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Technology Stocks : General Lithography

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To: James Word who wrote (629)9/18/1997 10:44:00 PM
From: LLCF   of 1305
 
<Maybe I'm a bit confused, but aren't all vendors shipping Excimer
DUV steppers? Aren't these steppers using refractive optics?
Don't those systems require the narrow-bandwidth Cymer lasers, just like the step-and-repeat systems (pretty sure the answer is yes).>

Yes steppers, but they are not shipping "scanners", which are far more complex and demanding on the laser (from the cymer conference call which is a great read) but of course also do things that steppers cannot do: higher resolutions with higher depth of focus, over larger field sizes. Hence scanners require even more precise lasers than those in use now.

As for SVGI being the only one of "The gang of Four" to ship steppers, someone is saying that ASMLF is shipping, but when I read the press release they used words like "ship imminently" etc....there seems to be a lot of ropeadope going on between these guys PR depts....I still have not read that anyone but SVGI has shipped a scanner. And I have not heard a delivery date yet either.

DAK
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