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Technology Stocks : Cymer (CYMI)

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To: Starlight who wrote (2375)	9/22/1997 11:44:00 AM
From: TheSpecialist	of 25960

Betty, Point taken. One thing your should realize though, is that a point source is divergent. This was one of the primary problems with the Hampshire Instruments "point source" stepper design. I believe that JMAR has received one of the Hampshire steppers. The divergent beam of xrays cannot be collimated like DUV lasers can (in fact one of the SDI programs was to develop an xray collimator, but ended without success). This means that very restrictive placement constraints (i.e. source to mask to wafer) have to be accomodated. To my knowledge, noone has been able to overcome these constraints. If JMAR has, then they can revolutionize the industry. But at this point in time I think that is highly unlikely. One last thing, SAL's xray steppers have been designed for hard xrays...that means that they are hooked to a synchotron source and have no lens elements. A point source requires lens elements (like EUV). TS

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