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Technology Stocks : Cymer (CYMI)

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To: FJB who wrote (2590)	9/22/1997 12:54:00 PM
From: mauser96	of 25960

I printed out an article but can't remember the source.. However the statement was made by Poalo Gargini in an article by Jack Robertson, so maybe a search would find it . The article said that Aubrey "Bill" Tobey a consultant "concurred that the Microscan II mercury lamp could indeed be used to reach 0.25 micron and perhaps even 0.18 micron linewidths. However he said the wide beam illumination would not have the narrow beam of deep-UV eximer lasers, which could make it difficult to get very sharp line edges" I have read elsewhere that they might be able to push the laws of physics this way by exceedingly precise lens construction. Semiconductor companies would much rather stay with a proved technology as long as they can..

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