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To: mauser96 who wrote (2629)9/22/1997 1:51:00 PM
From: Paul Dieterich   of 25960
 
I asked about the Microscan .18 micron question over on the Intel thread, and Yousef responded (#32404):

"Paul,

Re: "Intel has stated that they can go to 0.25 microns for sure, and probably to 0.18 using a modified mercury UVL lamp."

Intel is currently using SVGL scanners that use a Mercury (Hg) arc lamp for their exposure tool on the .25um process in production. I'm sure that they have also used this tool to do some early learning at .18um by shrinking just the poly level. When it comes to producing parts at .18um (with the full set of design rules), Intel will need a
newer scanner with a laser illumination source. This is because a
laser source has a much narrower beam width and the optics in the
scanner can be optimized for finer resolution. So for .18um manufacturing, Intel will use laser illumination on a scanner.

Make It So,
Yousef"
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