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Technology Stocks : Cymer (CYMI)
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To: Maxwell who wrote (2643)9/22/1997 2:41:00 PM
From: FJB   of 25960
 
Maxwell,

RE: This technique works but the THROUGHPUT IS VERY SLOW! Micrascan can get at best 20 WAFERS/HR!

Early prototypes of the PE step and scan tool were getting throughput of 50 WPH. I have a feeling the current Micrascan II does even better.
almaden.ibm.com

Bob

PS If the throughput on the lamp based tool were so low, why order more of the tools. This wouldn't make sense.
svg.com
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