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To: FJB who wrote (2831)9/23/1997 11:10:00 AM
From: Starlight   of 25960
 
Robert - >>>If you can name one chip-maker that is going to use XRL for producing 0.25 and 0.18 geometry chips, please do so and give a reference.<<<<

This is from "Microlithography World" - Winter, 1997 edition:

"Recently 14 Japanese companies joined together in a new industrial collaboration entitled Association of Super Advanced Electronics Technology (ASET), in which XRL is the most prominent development task. Mitsubishi recently announced plans to implement XRL in manufacturing at the "0.25 micron shrink" stage, to take place before the end of the century."

Betty
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