Company Press Release:ATMI Expands SDS Gas Source Manufacturing Capacity
Tuesday September 23 10:39 AM EDT
DANBURY, Conn.--(BUSINESS WIRE)--Sept. 23, 1997--
Second Manufacturing Plant Designed to Meet Growing Demand
Advanced Technology Materials Inc. (Nasdaq:ATMI), and Matheson Gas Products, today
announced that ATMI is bringing on-line additional SDS(TM) Gas Source manufacturing capability
to meet rapidly expanding demand in the semiconductor industry.
The SDS(TM) Gas Source -- developed by ATMI and distributed under license by Matheson Gas
Products -- is an industry-leading sub-atmospheric dopant gas delivery system that significantly
increases production efficiencies and virtually eliminates catastrophic gas releases.
The SDS(TM) Gas Source technology, now in use in the semiconductor industry's ion implant
sector, is fast becoming the preferred dopant delivery method. With the SDS(TM) Gas Source
technology, toxic and hazardous gases are stored and delivered below atmospheric pressure,
removing many of the safety concerns associated with high-pressure gases. By storing up to ten
times as much process gas and offering shorter implanter tuning times after a gas change, production
efficiencies increase. The SDS(TM) Gas Source offers significant productivity increases--on
average, 5 to 10%--over solid dopant sources.
Karl Olander, ATMI Vice-President, SDS(TM) Gas Source, said, ``The SDS(TM) Gas Source is
one of the top dopant delivery innovations in safety and productivity for the semiconductor industry,
with one of the fastest market penetration rates of any product introduced into this industry. Based
on our latest information, we believe that more than 80 percent of new implanters built in the U.S.
are shipped SDS(TM) Gas Source-ready. To meet growing demand for SDS(TM) Gas Source
products and more capacity -- as well as to expand new products under development -- ATMI just
completed construction of additional SDS(TM) Gas Source manufacturing and R&D labs at its
Danbury, Connecticut location. The new facilities include capacity for boron trifloride, a key
material used in ion implant technology.''
The SDS(TM) Gas Source technology uses ATMI's patented adsorbent technology -- special
materials with chemical ``hooks'' that bind to specific gas molecules. This reduces vapor pressure,
effectively converting the gas into a ``no pressure'' material. The ion implant process, running under
vacuum, uses the pressure difference to pull gas from the SDS(TM) Gas Source cylinder. Industry
penetration and acceptance were reinforced with Unit Instruments' announcement (May 28, 1997)
of two new models of mass-flow controllers specially designed for use with the SDS(TM) Gas
Source.
Ralph Kirk, SDS(TM) Gas Source Marketing Manager with Matheson Electronic Products Group,
said, ``The SDS(TM) Gas Source is a breakthrough advance for handling semiconductor process
gases. In partnership with ATMI, Matheson is also expanding its worldwide technical and customer
support capabilities. The SDS(TM) Gas Source products are now produced in two locations:
Gloucester, Massachusetts and Danbury, Connecticut. By the end of 1998, we intend to have a
third plant up and running.''
ATMI is a leading provider of advanced semiconductor materials and environmental equipment. It is
also developing next-generation semiconductor devices based on its new materials technologies.
Matheson Gas Products, headquartered in Parsippany, N.J., is a wholly-owned subsidiary of
Nippon Sanso Corp., the world's largest supplier of gases and equipment to the semiconductor
industry. Matheson Electronic Products Group (EPG), based in San Jose, Calif., is a single source
provider of specialty gases, gas handling equipment, purification systems, systems engineering, and
site management services to semiconductor manufacturers worldwide.
atmi.com
Statements which are not historical information are forward looking, which involve risks and
uncertainties, including, but not limited to: changes in semiconductor industry growth or ATMI's
markets; competition, problems, or delays developing and commercializing new products, and other
factors discussed in ATMI's filings with the Securities and Exchange Commission.
SDS(TM) Gas Source is a trademark of Advanced Technology Materials Inc. and Matheson Gas
Products. |
