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Politics : Formerly About Applied Materials
AMAT 297.57-6.6%3:59 PM EST

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To: Kevin Trilli who wrote (8132)9/23/1997 7:34:00 PM
From: Lucinos   of 70976
 
Kevin,

About 10 Years ago in the industry, the copper lines were
electroplated after sputtered and etched a thin copper film
(a few tenth of a nano meter) on the wafer surface (called
seed layer). This was a very common process for making the
thin film devices back at that time. Since Al process is much
cheaper than copper process, the copper was only used for
a few type of devices.

To deal with 0.25um line, to use copper has a lot of advantage.
However, I don't think we can use electroplating unless there is
a breakthrough in the technology by someone. Thanks.

Paul L
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