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To: Grant C who wrote (2983)	9/24/1997 12:54:00 AM
From: Maxwell	of 25960

<<A good portion of that order was for i-line steppers, so you'll need to refigure if we can get the breakdown.>> Why would they want to buy i-line? It would be obsolete by next year when everyont is ramping up .25u. The majority of the cost in the stepper is not the laser. From strategic point of view it makes sense to buy all DUV excimer steppers. These steppers can be used in .18u with phase shift mask . Maxwell

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