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To: Maxwell who wrote (3065)9/24/1997 1:24:00 AM
From: Grant C   of 25960
 
<<Why would they want to buy i-line? It would be obsolete by next year when everyone is ramping up .25u. The majority of the cost in the stepper is not the laser. From strategic point of view it makes sense to buy all DUV excimer steppers.>>

For many non-critical layers, .25 um lines are not economical nor practical. Many IC makers do not currently need to move to DUV as they still work as high as 1.2 um. Microprocessors with many millions of circuits will be the first to have most layers at .25 micron. ASIC's, flash, logic - these applications will continue to utilize i-line technology for some time to come. I hope The Specialist will offer some input as well.

Also, a large part of stepper costs are in the lense (1/2 to 1/3). Very expensive pieces of quarts that take a long time to process (9 months).
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