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To: Maxwell who wrote (3071)	9/24/1997 11:55:00 AM
From: TheSpecialist	of 25960

Maxwell, Unfortunately, that is not the way it works. Fabs buy a mix of steppers/scanners based on total cost of ownership and ROI. The i-line steppers cost less to buy, operate, maintain, and the related process is cheaper. 248nm costs more in all of these areas. The semiconductor manufacturers strive to get their product to market with a competitive price and make the highest margin possible. With this in mind, the best outfitting of a fab is a mix of iline and 248nm. You need to bear in mind that the non-critical layers for most applications will remain non-critical for years to come. TS

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