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Technology Stocks : Cymer (CYMI)
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To: ken Su who wrote (3208)9/25/1997 10:36:00 PM
From: TheSpecialist   of 25960
 
Ken and thread,

"What I heard about Nikon and Canon is they are trying to improve throughput by having two slits for light to pass. Due to software
problem(I think), the focus on edge dies is not that good. I think it
is a very common issue for a new product to face. The machine is shippable which they are doing now. I don't think the situation is
as bad as Monkey security described. Both co. is working day
and night to resolve it. Maybe you can add more to this issue."

This statement is not about the laser. It could be about any
number of things. I don't know specifics, but working from your statement it, one possibility is that the scanning stages are
generating too much vibration and subsequently distortion. To overcome this they may have had to slow down the stages which could be limiting throughput. To overcome the throughput, they may be going to a larger slit size (if their lenses and illuminators are good enough). However, I don't see any connection to two slits.

Unless, they are not talking about two parallel slits, but serial
slits to better manipulate the illumination they have coming out of
the laser.

Anyway, I am babbling here. I need a few more details to put
together the right scenario. Can you provide any further insight?
Parallel? Serial? Locations of slits?

TS
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