Axcelis Wins RapidCure FC Sale to Japan's CASMAT Semiconductor Industry Consortium
Monday December 4, 8:32 am ET
Advanced UV-based film curing system chosen for research into development of new, leading-edge semiconductor materials
BEVERLY, Mass.--(BUSINESS WIRE)--Axcelis Technologies, Inc., (NASDAQ: ACLS - News) today reported it has received an order for its RapidCure FC film curing system from Japan's Consortium for Advanced Semiconductor Materials and Related Technologies (CASMAT). Consortium members will use the RapidCure FC at CASMAT's Tokyo-based center for the research and development of new and innovative spin-on dielectric films for a multitude of semiconductor-based applications.
"The development and integration of new semiconductor materials are critical to ensure that chipmakers achieve the aggressive performance goals of next generation devices," said Tadashi Toyoda, Axcelis' managing director for Japan. "The RapidCure FC system includes a propriety UV lamp design and manufacturing process, giving customers unmatched flexibility in tailoring the curing process to their unique application needs."
UV curing is an enabling technology for next generation device development, allowing chipmakers to change or enhance the properties of materials used to build advanced transistor structures. RapidCure FC, for example, can be used to enhance the mechanical and electrical properties of both CVD-based and spin-on low-k films so they can be adopted for 45nm devices. The tool can also be used to repair transistors through UV annealing, improve transistor speed with silicon nitride film curing and remove charge build-up in advanced non-volatile memory devices.
Axcelis is the recognized leader in the semiconductor industry for UV curing technologies, with more than 2,000 curing systems worldwide. Axcelis offers three configurations of the RapidCure system, including the RapidCure FC, RapidCure CE and RapidCure PS, to give customers the flexibility to cover a range of film curing, charge erase and photostabilization applications.
Axcelis representatives will be available to discuss the RapidCure FC and UV assisted curing applications during SEMICON Japan on December 6-8. Interested parties are invited to stop by the Axcelis booth, #3A-301, at the Makuhari Messe in Chiba, Japan.
About Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Saijo, Japan through its joint venture, SEN Corporation, an SHI and Axcelis Company. The company's Internet address is: www.axcelis.com.
Forward Looking Statements
This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.
Contact:
Company Contact:
Axcelis Technologies, Inc.
Maureen Hart, +1-978-787-4266
Fax: +1-978-787-4275
maureen.hart@axcelis.com
or
Investor Contact:
Axcelis Technologies, Inc.
Steve Bassett, +1-978-787-4000
Fax: +1-978-787-9133
investor.relations@axcelis.com
or
Agency Contact:
Loomis Group
Heather Smith, +1-617-638-0022
Fax: +1-617-638-0033
smithh@loomisgroup.com
Source: Axcelis Technologies, Inc.
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