TWAV 1.25
Therma-Wave, Inc. engages in the development, manufacture, and sale of process control metrology systems used in the manufacture of semiconductors. It offers products for the measurement of transparent and semitransparent thin films, and critical dimensions and profile of integrated circuit features. The company’s product families include Therma-Probe, Opti-Probe, and Opti-Probe Critical Dimensions and Real-Time Critical Dimensions. These products use proprietary and patented technology to provide noncontact, nondestructive measurements for the basic building blocks, or process modules, used in the manufacture of integrated circuits. Its products perform various functions, including ion implantation, dielectric film and conductor film deposition and etching, chemical mechanical planarization, and wafer patterning.
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