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Technology Stocks : Cymer (CYMI)
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To: Robert DeHaven who wrote (4549)10/4/1997 9:51:00 PM
From: Yousef   of 25960
 
Bob,

Re: "I am dying to know....Why doesn't Intel use CYMI's DUV?"

This is actually a pretty easy question to answer ... Intel started
using DUV technology with their .35um process which was developed back
in '92 - '95. Intel wanted to be very aggressive on their poly/gate
level and decided to use DUV just for this one layer. Back then, only
SVGL was producing a system that could meet their needs (no laser based
systems available). So, Intel used this as the tool of choice in .35um
and then also used this tool for their .25um process (following copy
exactly methodology).

For the future, Intel will go to laser based lithography tools. The reason
is that with a laser, one gets both higher output at 248nm AND a much, much
narrower bandwidth at 248nm (very little spread in wavelength). This is
important because the optics in a stepper or scanner have to be designed
for a particular wavelength and the more this designed can be optimized
for exactly 248nm, the better the resolution. This will allow 248nm laser
tools to be used in manufacturing for .18um technology. Hg Arc lamp
spectrums are much too broad and can't be filtered enough to match a
laser source.

The downside is that with a very narrow bandwidth source (like a laser), interference effects (standing waves) can also cause printing/resolution
problems. This has forced most lithographers to use BARC's (Bottom
AntiReflection Coatings) underneath the resist. This adds cost and complexity
to the process.

Hopefully this helps,

Yousef
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