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Technology Stocks : Cymer (CYMI)
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To: Tim Bagwell who wrote (4669)10/7/1997 9:08:00 AM
From: TheSpecialist   of 25960
 
Tim and NYC,

If this is the source of the vibration issue, then what is occuring
is site induced vibrational effects on the laser. The impact to
laser performance is the ability to narrow the spectral bandwidth
for the refractive lenses of Nikon and ASML. Perhaps this is why
you have not heard similar about SVGL (they can use a broader
bandwidth and therefore don't require the critically aligned
narrowing optics). You are right Tim, the solution is vibration
isolation mounts for the laser...No big deal!

TS
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