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Technology Stocks : Cymer (CYMI)
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To: Tim Bagwell who wrote (4722)10/7/1997 11:32:00 PM
From: Si Eng.   of 25960
 
The vibration problems are NOT site related at all. The vibration issue IS STILL a problem and it's with the laser chamber itself. The blower motor spins at about 3,300 RPM's. If the bearings are not set up correctly or are old, they will cause vibration and cause low energy, which in turn ramps up the operating voltage of the laser. It does not vibrate the beam into the stepper/scanner. Cymer's new chamber is modified for better vibration isolation but we still had to replace one of those new chambers after only 5 weeks in use. Lucky for us the two chambers we had replaced were still under warranty.
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