This could be the reason for the recent move
SAN JOSE, Calif.--(BUSINESS WIRE)--Oct. 8, 1997--Matheson
Electronic Products Group (EPG) and Advanced Technology Materials
Inc. announced today that their new Safe Delivery Source (SDS)
product for ion implantation utilizing Silicon Tetrafluoride (SiF4)
is now available.
Now all four ion implantation gases including Arsine, Phosphine
and Boron Trifluoride are available as Safe Delivery Source products
from Matheson EPG and Advanced Technology Materials Inc. (ATMI).
With the availability of SiF4, it is now possible to go to an all SDS
gas source ion implanter permitting much lower exhaust rates and
lower ventilation costs for fabs. This minimizes the probability of
fab evacuation due to toxic gas leaks.
After extensive field testing over the past nine months at
customer sites and ion implanter manufacturers, it was found that
implanter performance was equal to that of high pressure gas source
without the danger of catastrophic release of toxic and corrosive
Silicon Tetrafluoride (SiF4). The SDS products are available in
three sizes -- WY cylinders (0.4 liters), JY cylinders (2.2 liters),
UY cylinders (6.6 liters).
The SDS product line features a state-of-the-art approach to the
safe delivery of ion implantation dopant gases, allowing users the
equipment flexibility of a gas source with the safety and performance
of a solid source. Using pure gases at low pressure, SDS delivers
gas based on the pressure differential between the SDS cylinder and
the ion source of the implanter. SiF4 SDS gas cylinders will deliver
approximately the same amount of gas filled at one atmosphere as the
same sized high pressure cylinder at 400psig.
According to Ralph Kirk, manager of New Technologies for Matheson
EPG and Karl Olander, vice president of the NovaSource Division of
ATMI, the SDS technology has received worldwide acceptance within the
semiconductor industry. "So enthusiastically has this product line
been received that all ion implanter manufacturers will provide
options to support the SDS on new equipment and offer kits to
retrofit many of their earlier models," commented Ralph Kirk.
ATMI, located in Danbury, Conn., is a leading provider of
advanced semiconductor materials and environmental equipment. It is
also developing next generation semiconductor devices based on its
new materials technologies.
With over 70 years of experience, Matheson EPG is a single source
provider of specialty gases, gas handling equipment, purification
systems and support services to the semiconductor manufacturers
worldwide. In addition to Safe Delivery Source (SDS)(TM) products,
Matheson EPG also produces ULTRA-LINE(R) high purity process gases,
Semi-Gas(R) Systems brand of gas handling equipment, Nanochem(R)
brand of purification systems, customer technical services, systems
engineering and site management services.
Headquartered in San Jose, Matheson EPG is a division of
Matheson Gas Products, located in Parsippany, N.J. Its parent
company, Nippon Sanso Corporation (NSC), is the world's largest
supplier of gases and equipment to the semiconductor industry.
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