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Technology Stocks : Cymer (CYMI)

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To: Ian@SI who wrote (4872)	10/10/1997 1:03:00 AM
From: James Word	of 25960

Ian RE: "Fabs will need more than twice as many of Cymer's lasers to keep up with the other tools." Considering the stepper alone (neglecting resist processing time), 300mm processing will take more time for 2 main reasons: 1.) Alignment 2.) Exposure. The biggest increase will be in step 2. That's where Cymer comes in. I imagine that one of the requirements to make 300mm competitive with 200mm processes is higher output power lasers (and more sensitive resists) to cut down on step 2.) Your statement made me wonder: Are you suggesting that the solution to this problem is using more that 1 laser per exposure tool? Seems kinda expensive, maybe I misunderstood. My reasoning carries me along this line: In order to expose "X" number of product die at a given rate one will need "Y" number of exposure tools at 200mm. Processing the same number of product die at 300mm at the same rate will require fewer exposure tools. Therefore a fab that is supposed to put out a given number of product will require fewer exposure tools at 300mm vs 200mm. This means fewer lasers in the fab, assuming 1 laser per tool. Maybe I misunderstood your reasoning. If so, please elaborate. James Word

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