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To: BillyG who wrote (4980)10/12/1997 8:48:00 PM
From: Tulvio Durand   of 25960
 
Thanks BillyG for the information. Apparently JMAR is already using direct-write lithography (thereby eliminating need for mask) in producing ASIC prototype chips.

calasic.com

Seemingly this process could be used in pilot production runs, yielding few, albeit expensive, XRL produced chips that have extremely dense packaging for exotic applications -- such as in spy satellites. Outside of possible pentagon interest,there is probably insufficient commercial market for very expensive, say 0.01-to-0.05 micron dimmensioned chips to justify investment in XRL tools now.

If x-rays could be focused, how does the focused x-rays solve the mask dilemma? And how is this different from direct writing? Thanks.

Tulvio
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