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Technology Stocks : Cymer (CYMI)
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To: Tulvio Durand who wrote (5023)10/12/1997 9:03:00 PM
From: BillyG   of 25960
 
If x-rays could be focused, how does the focused x-rays solve the mask dilemma? And how is this different from direct writing? Thanks.

If X-rays could be focused, then (1) you would not have to use a contact mask, and (2) you could use a large mask and reduce the image down to the pattern on the wafer, thereby reducing any errors present in the mask.

Think of direct writing this way: Direct writing is like hand lettering, and mask lithography is like using a printing press. In direct writing, a light or X-ray beam is scanned across the wafer (like a laser pointer) to "write" the pattern on the wafer.

Also, see this post: exchange2000.com
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