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To: BillyG who wrote (5024)10/13/1997 7:55:00 AM
From: Maxwell   of 25960
 
Direct Writing VS Printing:

I want to add to BillyG's comment. The reason the semiconductor industry wants printing over direct writing is throughput. It takes
100X-10,000X longer to direct write 1 FIELD of exposure on a Si wafer than than it is to exposed a mask. Throughput means money. Industry wants maximum revenues for the lowest costs.

BTW, E-beam direct write can draw features below 0.1um without any problem.

Maxwell
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