Several mentions of COHR/Lambda Physik mentioned:
buscom.com
An excerpt:
Laser Cavity Profile
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Lambda Physik, Inc. (3201 W. Commercial Blvd., Ft. Lauderdale, FL 33309; Tel: 954/486-1500 or 800/EXCIMER, Fax: 954/486-1501) and
Matsushita Research Institute Tokyo, Inc. succeeded in the joint development of a high performance KrF excimer laser for semiconductor
lithography. Dirk Basting, president of Lambda Physik, says that he believes this laser will open up a new era in excimer laser lithography. It will also have a dramatic effect on the reduction of cost of ownership, making this laser the most economical choice for lithography.
The trademarked NovaLine LITHO/S KrF excimer laser operates at 248 nm wavelength. In this ultraviolet (UV) region, a small difference in
wavelength significantly affects the performance of the stepper optics. For high resolution lithography, a small wavelength bandwidth is of vital importance. In this respect, the new jointly developed optical resonator fulfills the most stringent requirements.
Utilization of Lambda Physik's trademarked NovaTube metal/ceramics technologies is said to provide high throughput and low operating costs.
Among the characteristics of this laser are for high resolution stepper, narrow bandwidth is achieved; for high throughput stepper, high output power at high repetition rate is achieved; reduction of the running cost by factor of two is achieved, compared to a conventional laser, using NovaTube technology. |
