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To: Starlight who wrote (5011)10/13/1997 7:47:00 PM
From: Bookdon   of 25960
 
They are not available in any commercial sense. It is possible that IBM would sell a small number to selected strategic customers, but not in any volume. This is the kind of advanced and intersting experimental work that results in technical papers at engineering conferences. Even among people who work in this field joke about x-ray lithography being the technique of the future, and "it always will be". If optical (UV) techniques really do run out of tricks (and most people now believe that that won't happen until features get below 0.13 microns, in about five years), then x-ray may actually be used.
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