Thanks for the long quote and hyperlink. You know, I'm surprised that they discount Lucent so readily in this article. I haven't heard anything from them, but they HAVE demonstrated Scalpel at sub-.1um rules (and I really think they were the first to do so). And the more I hear about XRL, the better electron beam sounds. Admittedly, there are a few small details to work out (I'm joking! This is ironic!) like masks and throughput, but at least you don't need a power plant next door, truckloads of liquid helium, and a particle accelerator in the middle of the chip plant. And, as I understand it, e-beam will work at 1:4 just fine. And Lucent has lotsa' moola and lotsa' credibility, in the historic sense.
So -- anyone know what they have up their sleeve? I bet a buck they're waiting for the November Sematech shoot-out (don't yell at me for saying shoot-out, I almost said "closed cage competition") to announce some big breakthrough. This is becoming political, and if they go into it with topspin, they may come out with one of the Sematech nominations. |
