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Technology Stocks : Advanced Micro Devices - Moderated (AMD)
AMD 253.72+1.6%3:59 PM EST
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To: pgerassi who wrote (253010)6/7/2008 8:27:10 PM
From: misenRead Replies (2) of 275872
 
Can't you read? 30-60 PAIRS! For the top mirror. 60 pairs equals 120 layers a 2 scans per layer is 240 scans just for the top mirror. And this is from around 2000. After some small amount of research, I found I was low in my off hand recollection:

Apparently you have a reading comprehension issue as well. From your link, the caption for Figure 3 indicates:

Figure 3. In situ monitoring signal of 850-nm VCSEL dry etching using reactive ion etching and illumination by an 850-nm multimode VCSEL. Removing layer by layer from the top Bragg stack built of 37 layer pairs, there is an increasing effect of the phase mismatch of the top layer accompanied by a significant reduction in absolute reflectivity of the remaining multilayer structure.

I've bolded the important part which validates my presumption that ALL of the layers are etched at the same time, in a single patterning step -- not each layer with its own patterning step.

You also failed to provide any link which substantiates your "2 scans per layer" claim. I'm assuming that's because you can't find one.

BTW, thanks for providing a link that substantiates my position.

Will you concede now that your 200+ mask layer statement was ridiculous?

Misen
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