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Technology Stocks : Novellus
NVLS 2.400+2.1%Jul 24 5:00 PM EST

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To: gugie who wrote (3717)7/10/2008 3:12:58 PM
From: etchmeister   of 3813
 
Another big memory project going copper;
if I recall correctly AMAT was sole supplier for Elpida.
All the metal dep and metal etch might be going away
Numonyx/ Intel was the first memory maker adopting copper for NOR flash; so most likely the 8 inch process is based on copper and will be transfered to 12 inch.
Another BIG difference that comes with copper is the dielectric:
when using Al the metal is etched and than the dielectric is deposited; this dielectric requires excellent step coverage to avoid voids.
When going copper the dielectric (CVD) is being deposited and than a trench is etched into the oxide and than the copper is deposited into the trenches.
This is a key application NVLS is targeting; as far as I understand CVD is in many respects superior but it has poor step coverage; and supposedly NVLS CVD tool is specifically targeting memory mega fabs. Etching a trench into the dielectric obviously eliminates the issue of step cverage.

Elpida and Numonyx sign foundry deal for NOR flash production at 12-inch fab


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Press release, July 10; Esther Lam, DIGITIMES [Thursday 10 July 2008]

Elpida Memory and Numonyx, the NOR flash joint venture (JV) of Intel and STMicroelectronics, announced they have signed a letter of intent (LOI) to enter into a foundry agreement for Numonyx to utilize Elpida's 12-inch wafer fab in Hiroshima, Japan to manufacture NOR flash memory.

The companies will begin technology transfer and development activities for Elpida's Hiroshima plant soon, with initial production expected in the middle of 2009. Elpida will allocate a portion of its impressive capacity of approximately 120,000 wafers per month to Numonyx for the production of both 65nm NOR flash products as well as the upcoming 45nm process technology.

This agreement allows Numonyx to boost its ability to meet demand for its products, especially as it increases its focus on the embedded NOR market segment. The deal also allows Elpida to utilize its fab equipment efficiently and longer by engaging in both foundry and DRAM manufacturing using different generation technologies.

Adding Elpida to the global Numonyx manufacturing supply network is part of the company's plans to serve both existing customers in need of long-life support as well as to prepare for growth. Numonyx's existing 8-inch wafer facilities will continue to provide ample supply to many of its current customers that do not want to incur costs and complexities associated with re-qualifying its parts.

Following the LOI, Elpida and Numonyx plan to conclude their negotiations and finalize a definitive agreement within the current quarter.
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