Does anyone know what type of lasers ETEC uses. I found
this article today...
Etec ships newest mask-writing tool
HAYWARD, Calif.--Etec Systems Inc. here today announced the first shipment of its newest photomask writing tool, the Alta 3500, which is a scanned-laser system capable of supporting volume production of 0.25-micron ICs with masks and reticles.
The system will be used in Photronics Inc.'s facility in Austin, Tex., where the Alta 3500 will under o beta tests immediately, according to Etec.
"The acceptance of this tool went very smoothly, especially considering it is a beta system," said Jack Moneta, senior vice president of strategic planning and business development for Photronics. He said the Alta 3500 will join an Alta 3000 system, which is undergoing site acceptance testing. "The Alta 3500 will enable the Austin site to manufacture 0.25-micron and below device generation masks and reticles in production volume," Moneta said. |
