Dear Crossy and Mr. Picker: Here is some good good news and more importantantly news that really counts in the long run. The fundamentals of COHR have not changed in the least. Follows is their latest Press release:
DUV Excimer Laser for High NA Steppers and Scanners
Lambda Physik is ready to ship a new 248 nm excimer laser, designed to
provide optimum performance for the next generation of DUV
microlithography steppers and scanners using high N.A. projection
lenses. With an extremely narrow linewidth of < 0.6 pm FWHM, and 95% of
the laser energy contained within a bandwidth of less < 2 pm, NovaLiner
LITHO/S has the highest spectral purity of any DUV excimer laser
presently available.
A key element in achieving this outstanding performance is the use of a
patented PCRTM (polarization coupled resonator) design. PCR improves
both spectral purity and laser operating efficiency; increased
efficiency extends optical component lifetimes and lengthens maintenance
intervals. PCR is the result of a joint development effort between
Matsushita Research Institute of Technology (Tokyo) and Lambda Physik.
NovaLiner LITHO/S also features PowerLokr, a sophisticated, real time
exposure control system that delivers an accuracy of < ñ0.5%, even at
the highest scan speed. The laser is also available with HaloSafer,
Lambda PhysikOs unique, built in solid-state gas generator. HaloSafer
generates halogen gas, on demand, from inert materials, thus eliminating
the need for a cumbersome external halogen gas supply, passivated
delivery system and associated safety equipment.
The laser will be displayed at the upcoming SEMICON Japan exhibition,
from December 3 through 5, 1997, at Booth #3-A802.
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Lambda Physik is the leading manufacturer of excimer lasers for
industry, science, and medicine.
In the USA:
Please direct any questions to Dr. Heinrich Endert, Lambda Physik Inc.,
3201 West Commercial Blvd., Ft. Lauderdale, FL 33309, USA, Telephone:
(954) 486-1500, (800) EXCIMER or FAX (954) 486-1501.
In Europe:
Please direct any questions to Dr. Klaus Pippert, Lambda Physik
GmbH.,Hans-Boeckler-Strasse 12, D-37079 Goettingen, Germany, Telephone:
+49-551-6938-154, or FAX +49-551-68691
In Japan: Mr. Joe Nakane, Lambda Physik Japan Co. Ltd., German Industry
Center, 1-18-2 Hakusan, Midori-ku, Yokohama 226, Japan, Telephone:
+81-45-939-7848, Fax: +81-45-939-7849
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Now if you are an INVESTOR and not a TRADER this is the type of stuff dreams are made of. JDN |
