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Technology Stocks : Cymer (CYMI)

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To: Tim Bagwell who wrote (5755)	10/23/1997 5:41:00 AM
From: craig crawford	Read Replies (1) of 25960

Tim, you might find this article about lithography and Fiber Bragg Gratings interesting: nanoweb.mit.edu Fabrication of coherent quarter-wave-shifted gratings presents challenges to conventional lithography techniques Does this mean that Cymer's 248 nm DUV won't cut the mustard? ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ "Quarter-wave shifted Bragg gratings provide a compact, flexible filter for WDM applications. Insertion of an abrupt quarter-wave shift in an otherwise coherent distributed Bragg grating gives rise to a single narrow resonance at the Bragg wavelength. The small spatial periods required for these grating filters (~510 nm in SiO2 materials and ~250 nm in InP materials) necessitates the use of advanced nanolithography techniques in their fabrication." We are developing the techniques to design and fabricate integrated resonant channel-dropping filters and higher-order cascaded quarter-wave shifted Bragg filters. We describe here our progress towards this goal, which includes the design of quarter-wave shifted filters, device fabrication using a combination of spatial-phase-locked e-beam, optical and x-ray lithographies, and finally device measurement and characterization.

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