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Technology Stocks : General Lithography
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To: Sam Citron who wrote (669)10/23/1997 3:37:00 PM
From: C Dunn   of 1305
 
RE:how close... 12 inch wafer stepper available?

Though not a broadly disseminated news item, MOT reportedly did have T-shirts printed commemorating their production of a 12" IC. At least some layers were imaged on an MRS Tech. 'Panel Printer' (i-line)
MOT then purchased a machine which, if my info is accurate, is now at their pilot FED facility in AZ. That MRSI machines are optimized for display production explains 'this' stepper's current address.
There must be something unique about their motion control and/or field size which caused MOT to test 300mm prod. with this tool?
(Andrew can you hear me?)
Feature size limitation of their equip. precludes complete wafer layering. Maybe they'd have a place in a mix and match situation?
Though not much help Sam, the alignment capability of this stepper seems to hold some advantage vis-a-vis large area substrates and provide a clue as to what spec's.to look for. Yet, identifying a company with these attributes AND < line widths has been an elusive task. Also, highlighting alignment may serve as catalyst for the most informed among us to elevate/denegrate it's import. Maybe step and scan for big IC's will rule.
Most importantly Sam, I get any opportunity to "tout" a stock I'm temporarily under water with. : )

Chris

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