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To: Juniper who wrote (1211)	10/23/1997 5:56:00 PM
From: FJB	Read Replies (2) of 2946

IBM using Micrascan in embedded DRAM production. techweb.cmp.com Polcari said IBM is using the Silicon Valley Group Lithography Micrascan step-and-scan tool with its larger field size to make the system LSI chips. IBM also gains a benefit in processing DRAMs and logic on the chip with the SVGL tool, because the same lithography system is now used in separate memory and microprocessor production lines, he added.

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