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Technology Stocks : General Lithography
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To: Scott Brooks who wrote (673)10/29/1997 7:57:00 PM
From: Alan Gallaspy  Read Replies (1) of 1305
 
Scott, re: "fab processes book"

I think you may be interested in

Microchip Fabrication: A Practical Guide to Semiconductor Processing
by Peter Van Zant (3rd edition, 1996?)
ISBN: 0070672504

and also a bit older but still pretty relevant

"Silicon Processing for the VLSI Era" S. Wolf and R.N Tauber
published by Lattice Press, may be out of print but is widely available from university libraries.
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