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To: Patient Engineer who wrote (7392)10/30/1997 9:24:00 PM
From: FJB  Read Replies (3) of 25960
 
Both Intel and TI are making large investments in DUV tools now and in '98. Intel is buying DUV(248nm laser) tools from both Nikon and SVGL because of their extendibility to 0.18&#181 drawn gate lengths. TI has a process called C07a going into pilot production in Q1 '98 with drawn gate lengths of 0.21&#181 of and plans for a process called C07b(0.18) to enter pilot production in Q4 '98.

The only limitation on the DUV tool market is the ability of stepper manufacturers to build them. Demand of 700 units vs. production 500 of units. With the requirement that early '99 tools get their lasers in late '98, the picture is quite vivid.

Bob
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