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To: Mason Barge who wrote (1263)	10/31/1997 1:25:00 PM
From: FJB	Read Replies (1) of 2946

Mason, Here's a more direct statement concerning SVGL and 0.18&#181. On the lithographic front, there is good news and bad news. The good news is that deep-UV will still work for 0.18-micron features, according to most suppliers. "Our Microscan-3 systems are specified for 0.25-micron operation but they are being used at some layers in 0.18-micron processes," reported SVGI vice president of sales and service Steven Jensen. techweb.cmp.com:80/eet/news/97/966news/newmetal.html

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