HERE IS A LOOK AT CYMER'S SPECS COMPARED TO KOMATSU SPECS:
KOMATSU:
Key Specifications of the KLES-G10K
Oscillating Wave Length: 248 nm
Oscillating Frequency: 1,000 Hz
Pulse Energy: 10 mJ
Average Output: 10 W
Spectral Line Width (FWHM): _Ÿ0.65 pm
Integrated Energy Stability: _Ÿ_} 0.8 %
Core Wave Length Stability: _Ÿ_} 0.1 pm
Gas Life: 100M pulses or 7 days
Gas Type: Kr, F2, Ne
High-Voltage Excitation Circuit: Semiconductor switching element
Preliminary Ionization System: RF(high-frequency) ionization
Safety Standards: CE Marking, etc.
CYMER PERFORMANCE SPECIFICATIONS (two separate models)
ELS-5000/ EX-5000Wavelength:248/ nm248 nm
Repetition Rate:1000 Hz/1000 Hz
Pulse Energy:10 mJ/15 mJ
Average Output Power:10 W /15
WSpectral Bandwidth (FWHM)< 0.8 pm /< 100 pm
Integrated Energy Stability:
(50 pulse window)< ñ 1%/ < ñ 1%
Gas Life:100 million pulses or 5 days
Window Service Interval:1 billion pulses
Expected Pulse Power Module Life:> 10 billion pulses
Expected Chamber Life:> 3 billion pulses
The laser reliability tests started in December, '96 for a period of ten weeks. A representative ELS-5000 laser (Figure 2), built in late Month2, was used for these tests. The general specifications are listed below. Laser Energy : 10mJ
Repetition Rate : 1000Hz
Spectral Width: < 0.8pm at FWHM and < 3.0pm at 95%
Maintenance:
Gas Life: 100 million pulses or 5 days
Diagnostics Check: Once a Week
Laser Status Test and Report: Once a Week
Laser windows inspection: 1000 million pulses, replace if required
Laser Output Coupler inspection: 1000 million pulses, replace if required
Laser Beam Splitter inspection: 1000 million pulses, replace if required
Komatsu Gas Life claim is 7 days, Cymer is 5 days. In speaking with Cymer regarding this they stated that gas life can vary depending on useage with an exceptable range of 1 to 2 days. Cymer has been improving their specifications in this arena.
Komatsu claims that they will be able to build 10 units a month now and up to 20 units by early to mid next year. By the end of next year they believe they can produce up to 500 units. Cymer can currently produce up to 1000 units per year. Lasers will comprise 15% of fab lines by mid next year and 42% by the end of 1999. Many fab lines will use multiple lasers for multiple tasks, i.e., it isn't as simple as 1 laser for fab line, it is more reasonable that 2 to 3 lasers will functions on each fab line each performing separate functions.
Clearly, the Komatsu specifications are not an improvement over Cymer's systems if viewed within the window of variation depending on use.
I believe Goto claimed (I'll look it up) that the Komatsu laser pulse rate was twice that of Cymer's relative to gas life. Both systems put out 100 million pulses with Komatsu claiming that their total pulse output will last 7 days for Cymer's 5 days. The fact of the matter is that since Cymer's laser's have been in actual production for the past two years, Cymer and the system intigrators have improved the total pulse power up to 7 days since its introduction to the floor depending on its use. Check it out, call Cymer. It is no wonder that the industry is not being quick to embrace Komatsu's systems since their systems are relatively the same as Cymer's. The industry has already put the time and money into marketing and implenenting Cymer's systems. To market another system would require additional capital outlay which, at this time in the semi industry, could prove tenable (scare capital) .
Any comments? I hate to see this stock price degrdate as it has. There appears to be no immediate solution to its further degredation without some word from Cymer. |
