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Technology Stocks : Cymer (CYMI)
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To: D.J.Smyth who wrote (7793)11/2/1997 3:53:00 PM
From: Maxwell  Read Replies (2) of 25960
 
Darrell Smith:

<<do you see anything in the Komatsu specs relative to Cymer 5500 specs which would cause alarm? My conversation with Cymer regarding the gas life of the Komatsu (1m over 7 days versus Cymer 1m over 5 days)>>

I asked the same question to a Canon engineer at Semicon about Lambda Physics laser. I told them LP has an equivalent spec as CYMI and why don't you use the LP laser. He told me you can say anything in the spec. you want to. But when it is in continuous production it is a different story. He tested the Komatsu, LP, and Cymer and find that Cymer is the best. He said until Komatsu and LP improve their lasers they will stick to Cymer.

Theoretically the laser works best if the new gas is replenish continuously. The reason is that the waste gases are removed and new gases are available for lasing. However continuous replenishing is not practical in production and thus a cutoff is implemented. In the CYMI the gas is replenish automatically every 5 days. Thus it is transparent to the user. Frankly as a user I could careless on the number of days the gas replenish as long as I get stable wavelength and dosage from pulse to pulse and minimal downtime during gas replenishing.

We must wait for The Specialist to publish us on the Komatsu laser performance. He will be the closest source to the truth.

Maxwell
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