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LRCX 155.15+2.1%3:59 PM EST

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To: Sam Citron who wrote (3258)11/2/1997 4:55:00 PM
From: Cary Salsberg  Read Replies (1) of 10921
 
Sam,

RE: "Yes, I think that Tinsley makes optics for Micrascan II, which uses hg arc lamp...But I believe that Cymer DUV lasers, which Cary says (@ SVGI thread) are used in Micrascan III, use Zeiss optics."

You have suggested that Zeiss lenses are used in CYMI DUV lasers, and I that CYMI DUV lasers are used in Micrascan III, but these do not exclude Tinsley optics from Micrascan III. I believe there are separate optics for lasers and for the step and scan lithogrpahy tool.

Cary
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