Also from today's Solid State Technology
Companies equip White Oak Semiconductor's new 64-Mbit site.
The benchmark facility is a joint venture between Siemens Semiconductor Group and Motorola Semiconductor Products Sector. Applied Materials Inc., Santa Clara, CA, is supplying $100 million worth of advanced manufacturing tools for wafer processing and metrology. Canon USA Inc., Lake Success, NY, will supply photolithography tools, steppers, scanners, and technical support for 0.25-micron design rule production.
SpeedFam International Inc., Chandler, AZ, will supply its Auriga CMP system, to be used for both oxide and tungsten. GaSonics International Corp., San Jose, CA, will supply Performance Enhancement Platform photoresist removal systems. Air Products and Chemicals Inc., Lehigh Valley, PA, has entered into a long-term agreement to manage all the industrial gases and chemicals at White Oak's facility. |
