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To: mauser96 who wrote (8017)	11/3/1997 11:20:00 PM
From: Maxwell	Read Replies (1) of 25960

Lucius M.Lamar: <<What's a polygate CD?>> The term CD is used in the semiconductor industry is refering to the "critical dimension". The CD of a polygate is nothing more than the width of a polygate line if you cross section it. This CD is very important since it determines the speed of the transistor switching. Thus the term "critical dimension". The smaller the CD the faster it is for the CMOS transistor to switch. However when a designer design a transistor of certain geometry of certain threshold voltage for switching there is only a narrow range of width which the polygate can have to switch. If the CD is too fat then the transistor doesn't switch. If it is too small then the transistor dies. Since this is a critical step stability in the lithography tool is a must. Excimer laser lithography satisifies this criteria and is widely used to do polygate CD at 0.35um down to 0.25um process. Intel's 0.35um process for the PII has poly CD of 0.28um! Their PII at 0.25um process has CD less than 0.20um. They needed to go small to get beyond the 300MHz barrier. Maxwell

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