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Technology Stocks : Cymer (CYMI)

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To: rsc who wrote (8127)11/4/1997 5:49:00 PM
From: BillyG  Read Replies (1) of 25960
 
I'm not sure if this Lambda news was posted last week..............

sumnet.com

From the October 27, 1997 Issue of Electronic News

The Fab Line

By Chad Fasca and Dylan McGrath

Lambda Physik reported it is ready to ship a new 248-nanometer excimer laser, the NovaLine Litho/S design, to provide
optimum performance for the next generation of deep-ultraviolet microlithography steppers and scanners using
high-numerical-aperture projection lenses. The company claims the laser has the highest spectral purity of any DUV excimer
laser presently available. According to the company, a key element in achieving this performance is the use of a patented
polarization coupled resonator (PCR) design. PCR improves both spectral purity and laser operating efficiency; increased
efficiency is said to extend optical component lifetimes and lengthen maintenance intervals. PCR is the result of a joint
development effort between the Tokyo-based Matsushita Research Institute of Technology and Lambda Physik.
According to Lambda Physik, the laser will be displayed at Semicon/Japan later this year, Dec. 3-5.
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