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To: Maxwell who wrote (8142)11/4/1997 8:02:00 PM
From: BillyG  Read Replies (2) of 25960
 
The November 1997 issue of Solid State Technology has an article entitled "Lithography at an Inflection Point" on p. 127. It discusses the future of optical vs. x-ray lithography. The authors mention that optical lithography will begin to be impractical at about .13 micron. Do you agree?

Another article about lithography process control appears on p. 141, and it was written by the guy who manages the Lithography Tools Department at AMD. It is obvious from the article that he has spent a lot of time with DUV systems.
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