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Technology Stocks : Cymer (CYMI)
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To: Peter V who wrote (8166)11/5/1997 11:44:00 AM
From: TheSpecialist  Read Replies (2) of 25960
 
Sorry if this has already been replied to, but I figured I would add
my 2 cents.

0.25 micron lithography will be done with 248nm (current lasers)
0.18 micron lithography will be done with 248nm and some 193nm
0.15 micron lithography will be done with 193nm (and maybe some
strong phase shifted 248nm)
0.13 micron lithgoraphy will be done with 193nm
0.10 micron lithography may be done with 193nm and strong phase
shifting and possibly the most likely NGL (next generation
lithography candidate, which is not xray).

Cymers lasers will be used for all of these generations of
lithography as the critical or non-critical layer imaging source.

As far as xray and the other NGL's go, SEMATECH and the
Semiconductor Industry Association conducted technical review meetings
last week and are in the middle of a brainstorming workshop this week.
It is apparent from discussions with the attendees that the only
certainty is that none of these technologies will be used before the
0.10 micron generation. 248nm and 193nm will be the lithographies
of choice by the semiconductor manufacturers down to 0.10 micron.
This means that Cymer will support leading edge manufacturing (now)
and mainstream manufacturing through ~2010.

Hope this helps.

TS
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