REQUEST FOR HELP!
Dear Yousef,
Thank you for all of your input regarding Cymer. The rumours regarding the implementation of DUV with Cymer's lasers still continue, and I think it would be to the benefit of all to get the bottom of this.
Since you will be taking delivery of Nikon systems, you are in an excellent position to clarify things. In addition, you actually have a legitimate concern to insure that your company is taking delivery of a completely upgraded and functional DUV system.
I have summarized some of the questions that you could ask the Nikon people to clarify. Do you think it would be possible for you to push them to give you answers?
Start of fax from Yousef to Nikon sales guy:
Dear ,
I am looking forward to receiving my DUV lithography system.
However, I have been hearing a lot of rumours regarding various technical problems that your DUV systems and the DUV source laser have, and I feel that I have a responsibility to confirm that all of these problems have been cleared in the system that we receive. I have decided that I will only sign-off for payment on this system after all doubts have been cleared regarding system performance.
In order to make this process as quick as possible, I would like to request that you send me the following (preferably prior to shipment) for my advance study.
1. A list of all problems encountered in your DUV systems.
2. A list of corrections implemented to the above problems in my system, as well as the number of systems shipped to date with these corrections.
3. A list of all problems encountered with the Cymer DUV laser.
4. A list of corrections implemented to the above laser problems in my system, as well as the number of Nikon systems shipped with these corrections.
After taking delivery of the system, I will confirm that all of the corrections are functioning properly. After I find that the problems have been corrected, I will promptly sign off for payment.
End of letter
I am just throwing up ideas, but I think that if you could request the above info from Nikon, it would not only make you feel secure as a Nikon customer, but help all of us on the Cymer thread sleep better.
Thank you in advance!!
THC |