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Technology Stocks : General Lithography

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To: Doug Neubauer who wrote (672)	11/12/1997 11:50:00 AM
From: Andrew Vance	of 1305

I would check on the following title and see when the most recent edition was published. Introdcution to Microlithography edited by L.F. Thompson, C.G. Wilson and M.J. Bowden and published through the American Chemical Society. This book has been used as the text for numerous SPIE short Courses on lithography. My book is dated 1983 so it is an ancient tome. Another possibility could be to inquire at both Solid State Technology and Semiconductor International Magazines for recent issues on E-Beam lithography. While topics can be covered in each month's magazine articles, they dedicate at least one issue per year to lithography like E-beam. There is also a magazine published called Microlithography that you might inequire getting a free subscription to which will keep you at the forefront of information. Good Luck Andrew FWIW-I own the two books listed in the following link and think the Van Zant book is geared better to the non engineer while the Tauber book is definitely for a hardcore technologist. exchange2000.com The SPIE handbook mentioned on line is pretty decent which brings to mind that SPIE has annual symposiums where the proceedings are routinedly published. They run about $30 per proceeding and there are sessions devoted entirely to e-beam/laser/x-ray lithography.

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