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To: David M.Sokol who wrote (9360)	11/13/1997 8:50:00 AM
From: rsc	Read Replies (1) of 25960

DUV stepper test method wins Japanese patent techweb.cmp.com How does this impact on Cymer or its customers? One choice quote: Next year "promises to see a dramatic increase in the production line use of DUV 248-nm laser steppers for chip production," said Gary Forrest, inventor of the method and president of SensorPhysics.

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