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To: Paul Engel who wrote (40081)11/15/1997 4:22:00 PM
From: Lee Penick  Read Replies (1) of 186894
 
Paul,

Thanks you for your response on AMAT and their future. I find the equipment end of this industry very interesting.

After reading some but not yet all of the Scientific American you recommended, I wanted to ask, how do "they" position the stepper so that each successive mask is perfectly positioned to properly overlay the last layer. If we are dealing with .25 micron transistors, we must be talking tolerances that are a fraction of this dimension so the layers line up properly. What technology allows for this type of precision, both the measurement and the fine movement?

Thanks again,

Lee
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