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Technology Stocks : Cymer (CYMI)

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To: Maxwell who wrote (9581)	11/15/1997 6:59:00 PM
From: Zeev Hed	Read Replies (2) of 25960

Maxwell: Thanks for the explanation on copper. One question, if you do not plan to overlay the metallization layer, why whould you polish back. Inprinciple, the electroplating should occur only on the CVD copper and nnot on the insulating oxide. Furthermore, there is a well developed technology of electroless copper plating (where you activate the site where you want deposition, or in this case, the trenches) and I am wondering why electroless plating is not used. Zeev

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