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Technology Stocks : Intel Corporation (INTC)
INTC 46.47-4.5%Jan 30 9:30 AM EST
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To: Lee Penick who wrote (40454)11/15/1997 9:13:00 PM
From: Yousef  Read Replies (1) of 186894
 
Lee,

Re: "Does AMAT make the steppers, or some other company?"

The current DUV tool manufacturers are SVGL, ASML, Nikon and Canon ... these
tools are capable of defining features that are smaller than the wavelength
of exposure (248nm). this is accomplished with very high Numerical Aperature (NA)
lenses and advanced photoresists.

Re: "What type of mechanical device (or otherwise) can move a wafer in 0.02 micron
increments to line it up properly?"

The stage that holds the wafer is moved by stepper motors and the stage's
position is measured using a laser interferometer (X & Y) to very accurately
determine the stage position relative to the lens column. Each chip
is individually exposed so accurate stepping is critical ... Paul did
an excellent job explaining how the mask/reticle is aligned to the wafer.

Yousef
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