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Technology Stocks : Intel Corporation (INTC)

INTC 46.47

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Jan 30 9:30 AM EST

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To: Paul Engel who wrote (40446)	11/17/1997 7:31:00 PM
From: Aaron Cooperband	Read Replies (1) of 186894

Paul - Excellent explanation of the how allignment works in a stepper. One question: Re: "the wafer stage is minutely adjusted (x, y and theta) to bring the two images into proper alignment" I can understand the need for x, y, and z axis movements, but shouldn't you include twists as well, such as rotatating the wafer around any of these axes? (could this be what theta refers to?, but then you're missing the z axis!) Although wafers are exceptionally flat, there has to be some adjustment between the stage/wafer and the stepper in this manner, doesn't there? It seems to me that there are 6 types of movement to worry about. Aaron

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